MEMS Resonator Anchor Loss & Q-Factor Calculator
Micro-resonators & RF MEMS filters: Calculate acoustic energy leakage into the substrate ($Q_{anchor}$), Zener thermoelastic damping ($Q_{TED}$), and total unloaded quality factor ($Q_{total}$).
Resonator Geometry & Anchor Support
Nodal tether attachment width
Substrate & Operating Environment
0.1 Pa eliminates air damping
Quality Factor Dissipation Budget
Total Unloaded Q_total:
--
-- limited
f · Q Product:
--
Hz (Figure of merit)
Anchor Loss Q_anchor:
--
Substrate radiation limit
Thermoelastic Damping Q_TED:
--
Thermal relaxation limit
| Akhiezer Phonon Limit Q_ake: | -- |
| Viscous Gas Damping Q_gas: | -- |
| Zener Characteristic Frequency f_Z: | -- |
| Phase Noise Floor Indicator: | -- |
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