MEMS Capacitive Accelerometer Calculator

Inertial navigation & MEMS sensing: Calculate proof mass displacement, differential sense capacitance ($\Delta C / a$), mechanical resonance ($f_0$), and Brownian thermo-mechanical noise floor.

Proof Mass & Suspension Suspension

Proof Mass Length L_m (µm):

Proof Mass Width W_m (µm):

Device Thickness h (µm):

Suspension Resonant Frequency f_0 (kHz): Governed by suspension beam stiffness

Differential Sense Electrodes

Number of Sense Finger Pairs N:

Finger Overlap Length L_f (µm):

Nominal Sense Gap d_0 (µm):

Input Acceleration a (g):

Accelerometer Sensitivity & Noise

Capacitive Sensitivity (ΔC / a):

fF / g

Mass Displacement Δx:

nm at current input g

Proof Mass m:

Micrograms (µg)

Brownian Noise Floor (TNEA):

µg / √Hz thermal limit

Mechanical Spring Constant k:	--
Nominal Sense Capacitance C_0:	--
Displacement Sensitivity (dx / da):	--
Full-Scale Dynamic Range (est):	--

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MEMS Capacitive Accelerometer Calculator

Proof Mass & Suspension Suspension

Differential Sense Electrodes

Accelerometer Sensitivity & Noise

Frequently Asked Questions