MEMS Comb Drive Actuator Force Calculator

Microactuator design: Calculate the gap-independent electrostatic drive force ($F_x$), interdigitated finger capacitance gradient ($dC/dx$), folded-flexure suspension stiffness ($k_x$), and stroke.

Comb Finger Array Geometry

Number of Comb Fingers N: Total moving rotor fingers

Finger Structural Height h (µm): DRIE silicon etched thickness

Inter-Finger Lateral Gap g (µm): Spacing between stator/rotor fingers

Initial Overlap x_0 (µm):

Folded-Flexure Suspension Springs

Suspension Beam Length L_b (µm):

Suspension Beam Width w_b (µm):

Drive Voltage V (V):

Material Modulus E (GPa): Standard polysilicon = 160 GPa

Actuation Force & Stroke Output

Actuation Force F_x:

µN (gap-independent)

Steady-State Stroke Δx:

µm displacement

Suspension Stiffness k_x:

N / m (drive axis)

Lateral Stability Ratio (ky / kx):

Side-clamping safety factor

Capacitance Gradient (dC/dx):	--
Total Engaged Capacitance C_tot:	--
Side Pull-In Threshold Voltage V_side:	--
Actuation Linearity:	Pure Quadratic F ∝ V² (Constant dC/dx)

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MEMS Comb Drive Actuator Force Calculator

Comb Finger Array Geometry

Folded-Flexure Suspension Springs

Actuation Force & Stroke Output

Frequently Asked Questions