MEMS Thermal Microactuator Force Calculator
Electrothermal microactuators: Model electrical Joule heating ($\Delta T$), thermal expansion ($\Delta L$), lateral stroke displacement ($y$), and output blocking force ($F_{block}$).
Chevron Bent-Beam Geometry
Typical 1° to 3° bend angle
Multiplies blocking force
Electrical Operating Parameters
Mechanical Output & Temperature
Apex Stroke Deflection y:
--
µm lateral stroke
Blocking Output Force F_block:
--
mN stall force
Average Temperature Rise:
--
°C above ambient
Power Consumption:
--
Milliwatts (mW)
| Thermal Expansion ΔL: | -- |
| Mechanical Amplification (y / ΔL): | -- |
| Total Actuator Resistance: | -- |
| Response Time Constant τ: | -- |
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